TY  - BOOK
AU  - Murarka,S.P.
TI  - Metallization: theory and practice for VLSI and ULSI 
SN  - 0750690011 (acidfree paper)
AV  - TK7874 .M93 1993
U1  - 621.39/5 20
PY  - 1993///
CY  - Boston 
PB  - Butterworth-Heinemann
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Metallizing
N1  - Includes bibliographical references and index
ER  -