Murarka, S. P.  1993 <br/><br/>
Metallization :  theory and practice for VLSI and ULSI / 
Shyam P. Murarka. 
 - Boston   Butterworth-Heinemann,  1993. 
 - vi, 250 p. :  ill., diagrs., graphs ;  26 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0750690011 (acidfree paper) 9780750690010 
<br/><br/><label>LCCN: </label>92033603  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Very large scale integration.<br/>Metallizing.
<br/><br/><label>LC Class. No.: </label>TK7874  / .M93 1993 
<br/><br/><label>Dewey Class. No.: </label>621.39/5